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Instruments

透過電子顕微鏡(共同利用装置)
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Titan

透過型電子顕微鏡(TEM/STEM)

Probe Correcter

Monochrometer

60-300 kV

EDX, EELS, Tomography, in-situ

 
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JEM ARM200F

透過型電子顕微鏡(TEM/STEM)

Probe Correcter

60-200 kV

EDX, Tomography, in-situ

​ASTAR Precession

 
 
 
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Tecnai 20F

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JEM 2010

走査電子顕微鏡(共同利用装置)
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​Scios

Thermo Fischer Scientific Inc.

FIB-SEM

​FE-SEM, high-resolution

​SEM detectors: E-T, BSE, in-lens SE

EBSD (Oxford Instruments, Symmetry)

Ga-ion FIB

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​Versa 3D

Thermo Fischer Scientific Inc.

FIB-SEM

​FE-SEM

​SEM detectors: E-T, BSE

EBSD (TSL)

Ga-ion FIB

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Ultra 55

Carl Zeiss

FE-SEM

SEM detectors: E-T, EsB, HD-AsB, in-lens SE

​EBSD (TSL)

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Thermo Fischer Scientific Inc.

PFIB-SEM

FE-SEM

SEM detectors: E-T, BSE, in-lens SE/BSE

Immersion lens mode

​EDX (Oxford Instruments, Ultima)

EBSD (Oxford Instruments, Symmetry)

​TOF-SIMS

​Plasma FIB: Xe, Ar, O, N

Helios 5 Hydra

試料作製装置
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​SEM Mill

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CP

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